Micro Leverage Design of Silicon Resonant Accelerometer

This paper designs a leverage structure of the silicon resonant accelerometer. The mathematical model of the micro leverage magnifying structure is established firstly. According to the model, the pivot beam of the micro leverage is designed, then its parameters are optimized to realize the magnifying function of the micro leverage mechanism. Finally, simulation software is used to verify the correctness of the designed micro leverage. The relative error between the simulation result and the theoretical calculation result is 5.4%, which indicates that the designed micro leverage mechanism is feasible and provides a theoretical basis for improving the sensitivity of silicon resonant accelerometer.