25 Years of Microplasma Science and Applications: A Status Report

Microplasmas gained recognition as a distinct area of research within the larger field of plasma science about 25 years ago. Since then, the activity in microplasma research and applications has continuously increased. This paper provides a summary of some of the pertinent developments of microplasma sources that have contributed to making this field an exciting and rapidly growing area of interest, both in terms of scientific challenges and technological opportunities.