Diagnostic and simulation of ps-laser glass cutting

International Congress on Applications of Lasers & Electro-Optics(2012)

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Abstract
While the cutting of thin glass becomes more and more interesting especially for display applications, direct glass ablation with ps-lasers is a promising technology but not completely understood with respect to ablation and damage mechanisms.The principal goal of this work is to generate a basic understanding of the ablation process by a combination of simulation4, experimental diagnostics1 and process development2,3.In this publication the free electron dynamics is discussed, a numerical model is implemented including beam propagation and nonlinear absorption. Finally the results from simulation and experiment are compared.Major findings achieved with the numerical model so far are: The critical electron density is adequate / complex enough as a criterion for material removal. For small pulse durations ( 10 ps) ablation criterion is intensity based. The damage mechanism is revealed/identified and qualitatively in good comparison with the experiment. Beam propagation effects like interference play a major role in the damage mechanisms.While the cutting of thin glass becomes more and more interesting especially for display applications, direct glass ablation with ps-lasers is a promising technology but not completely understood with respect to ablation and damage mechanisms.The principal goal of this work is to generate a basic understanding of the ablation process by a combination of simulation4, experimental diagnostics1 and process development2,3.In this publication the free electron dynamics is discussed, a numerical model is implemented including beam propagation and nonlinear absorption. Finally the results from simulation and experiment are compared.Major findings achieved with the numerical model so far are: The critical electron density is adequate / complex enough as a criterion for material removal. For small pulse durations ( 10 ps) ablation criterion is intensity based. The damage mechanism is revealed/identified and qualitatively in good comparison wit...
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Key words
glass,ps-laser
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