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Evolution of traps in TiN/O3-sourced Al2O3/GaN gate structures with thermal annealing temperature

Xinyu Liu,Sen Huang,Qilong Bao,Xinhua Wang,Ke Wei,Yankui Li,Jinjuan Xiang,Chao Zhao,Xuelin Yang,Bo Shen,Shiping Guo

Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena（2018）

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