5PM3-PMN-023 Improvement of driving force of surface acoustic wave motor by micro surface-texture

Surface Acoustic Wave (SAW) motor is an actuator driven by friction force, in which larger driving force is generally required. To reply such requirement, larger driving area is expected theoretically. On the other hand, driving force of the SAW motor decreases by adhesion of wear particles at the at the contact interface. In this study, larger driving force is realized with larger driving area by introducing surface texture and hard coating such as DLC and W-DLC for controlling behavior of wear particles.