10102 Powder plasma assisted micro-nano fabrication using nano particles

In the recent years, a number of papers on electric discharge machining, electrochemical machining, and fine particle jet machining have been reported. Applying these micro scale machining methods to the nano scale machining compatible with semiconductor processes as in MEMS faces several difficulties. In this paper, nano particles were applied in order to establish a new nano scale machining method by imprinting the shape and diameter of nano particles through plasma generated in air. As the first step of this study, the relation between the shape and diameter of nano particles and the surface feature of workpiece caused by plasma discharge in air was focused.