Temperature Sensors Integrated into a CMOS Image Sensor

Proceedings of Eurosensors 2017, Paris, France, 3–6 September 2017(2017)

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Abstract
In this work, a novel approach is presented for measuring relative temperature variations inside the pixel array of a CMOS image sensor itself. This approach can give important information when compensation for dark (current) fixed pattern noise (FPN) is needed. The test image sensor consists of pixels and temperature sensors pixels (=Tixels). The size of the Tixels is 11 μm × 11 μm. Pixels and Tixels are placed next to each other in the active imaging array and use the same readout circuits. The design and the first measurements of the combined image-temperature sensor are presented.
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Key words
pixels,bipolar based temperature sensors,dark current
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