Stoichiometric Composition Variation of the AlN Thin Films Grown by Using Reactive DC Magnetron SputteringSungmin CHO,Moonjin LEE,Sangtae LEE,Jiho CHANG*New Physics: Sae Mulli(2017)引用 0|浏览1暂无评分关键词aln thin films,thin filmsAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要