Si3N4, SiC, Al2O3/Cu Bonding with Utilizing Mo Metallization of Ceramics by means of Ion Beam Dynamic Mixing

Journal of the Japan Institute of MetalsJournal of the Japan Institute of Metals and Materials（1992）

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Si&lt;SUB&gt;3&lt;/SUB&gt;N&lt;SUB&gt;4&lt;/SUB&gt;, SiC, Al&lt;SUB&gt;2&lt;/SUB&gt;O&lt;SUB&gt;3&lt;/SUB&gt;/Cu Bonding with Utilizing Mo Metallization of Ceramics by means of Ion Beam Dynamic Mixing