Electron microscopic analysis of surface damaged layer in Pb(Mg_1/3Nb_2/3)O₃–PbTiO₃ single crystal

Abstract Single crystals of lead magnesium niobate–lead titanate, Pb(Mg1/3Nb2/3)O3–PbTiO3 (PMN–PT), have superior dielectric and piezoelectric properties suitable for medical ultrasound imaging. Imaging devices with superior performance can be manufactured from thinner PMN–PT single crystals by mechanical dicing and/or polishing. Although it is often a concern that a damaged layer may form during the mechanical dicing and/or thinning process, the microscopic characteristics of the damaged layer have not yet been investigated in detail. In this study, the microstructural characterization of a damaged layer was investigated by transmission electron microscopy. It was found that mechanical polishing introduced dislocation near the surface of the crystal. It was also found that the domain structure was affected by the introduction of dislocation.