SOI-based Tunable Microring Resonator using Microelectromechanical Cantilevers

Hossam Shoman,Kenaish Al Qubaisi,Paulo Moreira,Clara Dimas,Anatol Khilo,Marcus S. Dahlem

Advanced Photonics 2016 (IPR, NOMA, Sensors, Networks, SPPCom, SOF)（2016）

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摘要

A new configuration of a tunable microring resonator using microelectrome-chanical silicon cantilevers for evanescent field perturbation, with electrostatic actuation, is demonstrated. A resonant wavelength shift of 0.4 nm is measured around 1558 nm.

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关键词

tunable microring resonator,soi-based

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