Ion Fluxes And Memory Effects In An Ar-O-2 Modulated Radiofrequency-Driven Atmospheric Pressure Plasma Jet

PLASMA SOURCES SCIENCE & TECHNOLOGY(2021)

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摘要
In this work we used molecular beam mass spectrometry to characterize ion fluxes produced by a modulated radiofrequency (RF)-driven atmospheric pressure plasma jet operating in a homogeneous gas environment (Ar + 1% O-2). The influence of the RF modulation frequency (100 Hz to 20 kHz) on the ion fluxes was investigated by time-resolved measurements, and the lifetimes of the dominant ions, O-2 (+), NO+, O-, O-2 (-) and O-3 (-), were found to be 28 +/- 2, 117 +/- 8, 7.3 +/- 0.4, 17 +/- 1 and 23 +/- 2 mu s, respectively. The absolute ion densities in the near afterglow region were found to be of the order of 10(11) cm(-3). Significant differences in the dynamics of the positive and negative ions were found; these are explained by the presence of electrons at similar densities in the afterglow produced by electron detachment reactions from negative ions due to the large concentrations of atomic oxygen and singlet delta oxygen. Transitions in ion flux dynamics for different modulation frequencies and at the startup of the plasma were analyzed together with intensified charge coupled device images recording the plasma propagation in order to assess the dynamics of plasma plume propagation and how it is impacted by 'memory effects'. Quantitative measurements of the ion densities enabling these memory effects are reported. The results in this paper highlight the tremendous impact of memory effects on plasma propagation and the corresponding pre-ionization.
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关键词
atmospheric pressure plasma jet, ion flux, memory effect, molecular beam mass spectrometry
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