Dry Etching
Biana Godin,Elka Touitou,Rajaram Krishnan,Michael J. Heller,Nicolas G. Green,Hossein Nili,David J. Bakewell,Didi Xu,Arunkumar Subramanian,Lixin Dong,Bradley J. Nelson,Yi Zhang,Rüdiger Berger,Hans-Jürgen Butt,Seong H. Kim,Nicolas Lafitte,Yassine Haddab,Yann Gorrec,Momoko Kumemura,Laurent Jalabert,Christophe Yamahata,Nicolas Chaillet,Dominique Collard,Hiroyuki Fujita,Yabing Qi,Avinash P. Nayak,M. Saif Islam,V. J. Logeeswaran,Garry J. Bordonaro,Vladimir Gubala,Thomas Nowotny,Pablo Varona Encyclopedia of Nanotechnology(2012)
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