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Application of a Quantum Cascade Laser for Time-Resolved, in Situ Probing of CH4/H2 and C2H2/H2 Gas Mixtures during Microwave Plasma Enhanced Chemical Vapor Deposition of Diamond

A. Cheesman, J. A. Smith,M. N. R. Ashfold,N. Langford, S. Wright,G. Duxbury

The Journal of Physical Chemistry A（2006）

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