<title>Packaging of large-area individually addressable micromirror arrays for the next-generation space telescope</title>

GuoQuan Lu, J. Calata, S. Wen, Sanghamitra B. Dutta,Yun Zheng, C. Stahl,Peter K. Shu

Design, Test, Integration, and Packaging of MEMS/MOEMS 2002SPIE Proceedings（2002）

Cited 0|Views0

No score

AI Read Science

Must-Reading Tree

Example

Generate MRT to find the research sequence of this paper

Chat Paper

Summary is being generated by the instructions you defined

&lt;title&gt;Packaging of large-area individually addressable micromirror arrays for the next-generation space telescope&lt;/title&gt;