Wide Band BAW Filter Based on Single-Crystalline LiNbO₃ Thin Film With Insulating Bragg Reflector

Lu Lv,Yao Shuai,Xiaoyuan Bai,Shitian Huang,Dailei Zhu,Yuedong Wang,Jiaoling Zhao,Wenbo Luo,Chuangui Wu,Wanli Zhang

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control（2022）

Cited 12|Views16

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Abstract

Bulk acoustic wave (BAW) filter with large bandwidth is an urgent need in fifth-generation (5G) communication systems. In the present work, 43° Y-cut lithium niobate (LN) single-crystal film is prepared on multilayer oxide film, and bulk acoustic filter with oxide Bragg reflector (BR) is successfully achieved. The design method of the filter and the fabrication process are presented. Atomic force ...

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Key words

Resonator filters,Hafnium oxide,Acoustics,Electrodes,Bandwidth,Surface treatment,Surface roughness

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