Diamond Metal-Semiconductor Field-Effect-Transistor-based Solar Blind Detector

Lei Ge,Yan Peng,Xiwei Wang,Dufu Wang,Mingsheng Xu,Xiangang Xu

2021 18th China International Forum on Solid State Lighting & 2021 7th International Forum on Wide Bandgap Semiconductors (SSLChina: IFWS)（2021）

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摘要

In this paper, a microwave plasma chemical vapor deposition (MPCVD) method is used to homoepitaxially epitaxial diamond film on a high-pressure high temperature(HPHT) diamond substrate, and a metal-semiconductor field effect transistor (MESFET) solar-blind detector is prepared to measure the photoelectric response performance of the detector. The results show that the detector made of diamond has ...

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