Acousto-optic modulation in a Si-waveguide

Irfan Ansari,Dries Van Thourhout,John P. George,Gilles F. Feutmba,Jeroen Beeckman

2021 IEEE 17th International Conference on Group IV Photonics (GFP)（2021）

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摘要

We demonstrate acousto-optic modulation (VπL ~3.6 Vcm) in a Si waveguide circuit by integrating a photonic compatible PZT film on the SOI chip. We then fabricated a small footprint inter-digital transducer (IDT) on the film to piezoelectrically actuate acoustic waves at GHz frequencies.

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关键词

Acoustic waveguides,Transducers,Frequency modulation,Conferences,Surface acoustic waves,Photonic integrated circuits,Waveguide theory

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