Formation of High Density ⟨111⟩ Textured Nanotwins in Evaporated Ag Thin Films Through Post-Deposition Ion Bombardment
IEEE Transactions on Components, Packaging and Manufacturing Technology(2022)
Abstract
For the production of Ag thin films containing a high density of nanotwins, evaporated Ag films were bombarded with an Ar+ ion beam with voltage of about 0.1 KeV. After the post-evaporation ion bombardment for 15 min, the equiaxial coarse grains in the surface region of the originally as-evaporated Ag films transformed into slender nanotwinned columns containing a highly More
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Key words
Films,Ions,Substrates,Silicon,Surface roughness,Rough surfaces,Ion beams
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