Computational ASCAL verification with inline ASCAL in high volume manufacturing fab for ArF XT:1460K with LOCO-B

Henry Chen,Jie Du,Zhao Cheng,Sheng-Tsung Tsao,Wenkang Song,Leslie Zhang, Stone Zhao,Hongwei Zhu,Menghsuan Tsai

2021 International Workshop on Advanced Patterning Solutions (IWAPS)（2021）

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摘要

In DRAM process development history, lens heating is always a huge problem that affects overlay and focus control, especially when using high dose and special DOEs like dipole and quasar. Computational ASCAL (cASCAL) is the offline simulation method to create Lens Heating Feed Forward (LHFF) models with input of reticle layout and illumination without system output loss. cASCAL is able to support ...

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关键词

Computational-ASCAL,cASCAL,Inline-ASCAL,Lens heating,Overlay,Focus

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