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High Density V-GAA Transistor Structure Array Based on Self-Aligned Double Patterning

Xingsong Su,Yunsong Qiu, Mengkang Yu,GuangSu Shao,Hongbo Sun,Weiping Bai,Deyuan Xiao,Kanyu Cao,Ted Park

2021 International Workshop on Advanced Patterning Solutions (IWAPS)（2021）

引用 1|浏览12
关键词
DRAM,V-GAA,SADP,high density
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