Development and Experimental Study of Coplanar Transmission Line on Polyimide Substrate Fabricated by Laser Micromachining

Authors of the paper propose and implement an approach to the fabrication of a flexible coplanar transmission line. The proposed approach is based on the utilizing the combination of the magnetron sputtering and pulsed laser ablation. Effective modes of micromachining by pulsed laser radiation of nanosecond duration, which allow selective removal of metallization from the surface of a flexible die...