Chrome Extension
WeChat Mini Program
Use on ChatGLM
VIPCreated with Sketch.

Analysis of Shear Induced Particle Agglomeration in CMP Slurries

A Khanna, P Kumar, J Lee,A Mishra,A Arjunan,D Singh,RK Singh

ECS Meeting Abstracts（2010）

Cited 0|Views5
No score
Key words
shear induced particle agglomeration
AI Read Science
Must-Reading Tree
Example
Generate MRT to find the research sequence of this paper
Chat Paper
Summary is being generated by the instructions you defined