Deep energy levels investigation on high resistivity monocrystalline diamond

Yutian Wang,Fangzhou Zhao,Hui Guo,Qian Sun

2021 IEEE Workshop on Wide Bandgap Power Devices and Applications in Asia (WiPDA Asia)（2021）

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摘要

Three independent methods, isothermal transient spectroscopy (ITS), Current-DLTS (C-DLTS) and optical-excited DLTS (O-DLTS), were preformed to search defect information of a transparent undoped bulk monocrystalline diamond. Activation energies from 0.407 eV to 1.184 eV and capture cross section in the range from 10−12 cm−2 to 10−18 cm−2 have been obtaine...

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关键词

Spectroscopy,Photonic band gap,Asia,Conductivity,Diamond,Energy states,Optical materials

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