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Optimal Deformation Procedure for Hybrid Adaptive X-Ray Mirror Based on Mechanical and Piezo-Driven Bending System.

Takato Inoue,Yuka Nishioka,Satoshi Matsuyama,Junki Sonoyama,Kazuteru Akiyama,Hiroki Nakamori,Yoshio Ichii,Yasuhisa Sano,Xianbo Shi,Deming Shu,Max D. Wyman,Ross Harder,Yoshiki Kohmura,Makina Yabashi,Lahsen Assoufid,Tetsuya Ishikawa,Kazuto Yamauchi

Review of Scientific Instruments（2021）

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