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(Ti/ZnO)N成分调制纳米多层膜的结构与透光导电性研究

祝柏林,姚亚刚,李涛涛,牛犇,付豪,黄成斌,吴隽, 王凯丰

Journal of Synthetic Crystals（2021）

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Abstract
采用射频(RF)和单极中频直流脉冲磁控溅射方法,在玻璃基板上制备了(Ti/ZnO)N成分调制纳米多层膜,并研究了调制周期数对其结构及透光导电性能的影响.通过X射线衍射、拉曼光谱、原子力显微镜、紫外可见吸收光谱以及霍尔效应测试结果表明:(Ti/ZnO)N成分调制纳米多层膜以(002)取向的纤锌矿型ZnO结构为主,具有明确的成分调制结构,各Ti层和各ZnO层厚度均匀连续,各界面平整且无明显扩散.在可见光范围的平均透光率大于85％,电阻率最小可达到2.63×10-2Ω·cm.
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