磷锗锌晶体脆塑转变临界切削深度的研究
Mechanical Science and Technology for Aerospace Engineering（2021）
Abstract
为实现磷锗锌(ZnGeP2)晶体超精密切削,提高表面加工质量,获得纳米级的超光滑表面,基于纳米压痕实验计算出磷锗锌晶体表面脆塑转变临界深度.在此深度内切削材料产生脆塑转变,并以塑性方式去除.在此基础上,采用单点金刚石飞切机床DFC600A开展磷锗锌晶体超精密切削.通过控制切削深度低于磷锗锌晶体脆塑转变临界深度,使材料表面仅发生塑性变形,实现了晶体表面纳米级光滑表面加工,表面粗糙度达1.01 nm,达到了对磷锗锌晶体表面的加工要求,验证了方法的有效性.
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