一款像素级开关电容阵列波形采样芯片
Semiconductor Technology（2021）
Abstract
设计了一款基于GSMC 130 nm CMOS工艺的像素级开关电容阵列(SCA)波形采样芯片.该芯片由32×32像素阵列和读写控制电路组成,每个像素集成了裸露的顶层金属、pn结和32×32 SCA,裸露的顶层金属和pn结作为电荷收集电极,SCA用于存储波形信号,每个像素尺寸约为150 μm×156 μm.测试结果表明:拟合的直流传输函数与理论分析相符,该波形采样芯片的输入满量程约为1V,单次成像模式下帧率可达10 MHz,直流噪声等效噪声电荷电子个数约为24 890,对正弦波信号采样后能够比较好地还原出原始信号波形.
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