Physical Modeling of Monolithic Self-Rolled-Up Microtube Interdigital Capacitors
IEEE Transactions on Components Packaging and Manufacturing Technology（2021）
关键词
Electrodes,Capacitors,Capacitance,Three-dimensional displays,Semiconductor process modeling,Fingers,Solid modeling,Capacitor model,microtube interdigital capacitors,on-chip interdigital capacitors,self-rolled-up membrane (S-RuM)
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