Capacitive Readout System for Micro Sensors and Actuators With Automatic Parasitic Cancellation

In this article, a capacitive readout system with automatic parasitic capacitance cancellation function is designed and implemented. The readout system is implemented with discrete components on a board level. The parasitic cancellation is realized by matching a digital programmable capacitor to the parasitic capacitance using a PI controller. The function of the readout system is verified by usin...