BEOL Compatible High-Capacitance MIMCAP Structure Using a Novel High K MaterialPaul C. Jamison,John Massey,Takashi Ando,Eduard A. Cartier,Hemanth Jagannathan, P. J. Chen,Eric Liu, Alex Romero, Sebastian Naczas,Vijay Narayanan,Shanti Pancharatnam,Phillip Restle,Joshua Rubin,Nicolas J Loubet,Kisik ChoiECS Transactions(2020)引用 5|浏览1关键词High-k DielectricsAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要