Reverse and compensation approach of the deposition thickness in manufacturing chirped mirrors

Shanghai Institute of Optics and Fine Mechanics CAS Shanghai,China *E-mail:yanzhiwang@siom.ac.cn Abstract—The chirped mirrors of a -100fs GDD in the wavelength 700-1400nm with high trassimission in the wavelength 505-540nm are designed and manufactured by ion beam sputtering. Time control is used in manufacture process. Based on the reverse layers thickness, the fitted actual manufactured every layer depositin velocity is obtained to compensate deposition thickness and realize the precise control in manufacturing chipred mirrors.