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Light Transmission and Surface Topography of KU-1 Optical Quartz after Sputtering and Cleaning from Al Films in RF Discharge of H2(D2)–Ne Mixtures

Gorodetsky A. E.,Markin A. V.,Bukhovets V. L.,Zolotarevsky V. I.,Zalavutdinov R. Kh.,Babinov N. A.,Dmitriev A. M.

Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques（2021）

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关键词
KU-1 quartz,light transmission,aluminum films,RF discharge,deuterium,hydrogen,neon,cleaning,atomic force microscopy
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