Nonlinear Dynamics of Electrostatic Comb-drive with Variable Gap Under Harmonic Excitation

This paper provides an extensive study of the nonlinear dynamics of a variable gap electrostatic comb-drive. The amplitude- and phase-frequency response, as well as the amplitude- and phase-force response of the comb-drive were obtained and analyzed with and without taking into account the cubic nonlinearity of the suspension. A significant variation in the frequency and force response is demonstrated in the presence of nonlinearity of the elastic suspension. Using numerical methods of bifurcation theory, solutions are obtained that correspond to the resonance peak of the frequency response when the constant and variable components of the voltages change. The result obtained makes it possible to determine the range of excitation voltage values that provide the required vibration amplitude in the resonant mode. The influence of the second stationary electrode on the dynamics of the system is estimated. The significant influence of this factor on the resonant-mode characteristics is revealed.