LUBRICIOUS TiSi(V)N FILMS FOR HIGH TEMPERATURE APPLICATIONS WITH CONTROLLED RELEASE OF THE LUBRICIOUS AGENT DEPOSITED BY DEEP OSCILLATION

This work is focused on the study of the influence of V additions on the structure, mechanical properties, oxidation resistance and tribologial behaviour of TiSiN films deposited by deep oscillation magnetron sputtering (DOMS) mode. Through the change of the peak power on the DOMS power supply, different structures could be reached to control the V ions diffusion. V additions significantly improve the mechanical and tribological properties of TiSiN films; however, it has a detrimental effect on their oxidation resistance. The improvement of the tribological properties with V incorporations was related to V2O5 formation on the sliding contact that acted as a lubricious tribo-film, decreasing the friction and protecting the coating from wear.