Experimental Characterization of Particle Distribution During the Process of Reducing the Air Supply Volume in an Electronic Industry Cleanroom
Journal of Building Engineering（2022）
关键词
Cleanroom,FFU,Particle distribution,Reduction of air volume,Layout of sensors
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要