Influence of wavelength and pulse duration on the selective laser ablation of WOx, VOx and MoOx thin films.

C. Munoz-Garcia,D. Canteli,S. Lauzurica,M. Morales,C. Molpeceres,Eloi Ros,P. Ortega,J.M. López-González,C. Voz

Surfaces and Interfaces（2022）

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摘要

•WOx, VOx, and MoOx have a promising role as hole transport layers (HTL).•We include a complete study of the laser-scribing of WOx, VOx, and MoOx films.•The main fluence thresholds for the removal of the oxide films are included.•The quality of the laser process is shown by good diode behaviour.•This laser scribing process is suitable for PV technology.

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关键词

Transition metal oxides (TMO),Hole transport layer,Selective contacts,Silicon solar cells,Laser ablation,Fluence threshold

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