Microfluidics and BioMEMS in SiliconSami Franssila,Cristina E. Davis,Michael K. LeVasseur,Zhen Cao,Levent YobasHandbook of Silicon Based MEMS Materials and Technologies(2015)引用 0|浏览6暂无评分关键词silicon,biomemsAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要