Design and Simulations of High-Sensitivity Multi-Directional Inertial Sensor
IEEE Sensors Journal（2022）
Abstract
This paper proposed the high sensitive linear and rotational based differential capacitive inertial sensor. The designed sensor consists of a proof of mass, which resides in an air medium — the acceleration measured along with a change of displacement and the differential capacitance. Sensor modeling and simulation have done with CoventorWare software. SOIMUMPS fabrication process has described be...
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Key words
Sensors,Capacitance,Sensitivity,Inertial sensors,Electrodes,Capacitive sensors,Capacitance measurement
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