Langasite Resonator with Non-uniform Electrode Thickness: Design, Simulation, and Fabrication
2021 IEEE International Conference on Sensors and Nanotechnology (SENNANO)（2021）
Abstract
Thickness-shear langasite resonator with non-uniform elliptical electrodes was designed, simulated, and fabricated to investigate the effects of varying electrode thickness on the spurious mode vibrations. A 3D FEM study was conducted to determine the optimal electrode design and verify the electrode design theories reported in literature. Simulated results showed 11% higher peak displacement for ...
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Key words
Electrodes,Vibrations,Q-factor,Three-dimensional displays,Sensitivity,Resonant frequency,Finite element analysis
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