Observation of Silicon Nitride Nanomechanical Resonator Actuation Using Capacitive Substrate ExcitationGengyang Mu,Nikaya Snell,Chang Zhang,Xitong Xie,Radin Tahvildari,Arnaud Weck,Michel Godin,Raphael St-GelaisarXiv (Cornell University)（2021）引用 5|浏览9关键词siliconAI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
