Warpage Analysis and Prediction of the Advanced Fan-Out Technology Based on Process Mechanics

IEEE Transactions on Components, Packaging and Manufacturing Technology(2021)

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摘要
Moore’s law has remarkably promoted the development of semiconductor technology over the last decades. The advanced packaging involving novel materials, structures, and processes has contributed significantly to achieving excellent performance. Among various forms of advanced packaging, wafer-level-fan-out packaging is superior to standard wafer-level packaging in that it allows more input/output ...
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关键词
Packaging,Semiconductor device modeling,Manufacturing processes,Finite element analysis,Silicon,Copper
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