High Performance Predictable Quantum Efficient Detector Based on Induced-Junction Photodiodes Passivated with SiO2/SiNx

Ozhan Koybasi,Ornulf Nordseth,Trinh Tran,Marco Povoli,Mauro Rajteri,Carlo Pepe,Eivind Bardalen,Farshid Manoocheri,Anand Summanwar,Mikhail Korpusenko,Michael N. Getz,Per Ohlckers,Erkki Ikonen,Jarle Gran

Italian National Conference on Sensors（2021）

Cited 8|Views19

Key words

silicon photodetector,inversion layer photodiode,induced-junction,surface passivation,PECVD silicon nitride,radiometry,optical power,primary standard,predictable quantum efficiency

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