Toward Monolithically Integrated Hybrid CMOS-NEM Circuits

Urmita Sikder,Kelsey Horace-Herron,Ting-Ta Yen,Giulia Usai,Louis Hutin,Vladimir Stojanović,Tsu-Jae King Liu

IEEE Transactions on Electron Devices（2021）

引用 5|浏览14

暂无评分

摘要

Nanoelectromechanical (NEM) switches offer the advantages of zero OFF-state leakage current, abrupt switching characteristics, nonvolatile (NV) operation, and relatively low ON-state resistance as compared with CMOS transistors predominantly used for digital computing today. NEM switches can be implemented using metallic interconnect layers formed in the back-end-of-line (BEOL) steps of a standard...

查看译文

关键词

Nanoelectromechanical systems,Electrodes,Switches,Plasmas,Force,Voltage measurement,Voltage

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要