III/V-on-bulk-Si Platform: Born for DRAM, Transplanted to LiDAR

Dongjae Shin,Hyunil Byun,Dongshik Shim,Jungho Cha,Yonghwack Shin,Changgyun Shin,Changbum Lee,Eunkyung Lee,Jisan Lee,Inoh Hwang,Kyunghyun Son,Hyuck Choo,Kyoungho Ha

2021 European Conference on Optical Communication (ECOC)（2021）

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摘要

We overview the III/V-on-bulk-Si platform with its key process, device library, feasibility, and outlook for its applications along with its comparison to III/V-on-SOI platform. Our trial on integrating photonics into 65-nm DRAM, laser development on the bulk-Si platform, and circuit and system developments for LiDAR applications are presented.

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dram,v-on-bulk-si

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