Novel Gas Aggregation Cluster Source Based On Post Magnetron

In this communication, a new gas aggregation cluster source is introduced equipped with post cylindrical magnetron. The rotation of magnetic circuit improves the usage of cylindrical copper target in terms of its homogenous consumption. Copper nanoparticles were successfully synthesized. Their deposition rate fluctuates at slow rotations of magnetic circuit. Cyclic trapping and release of nanoparticles from electrostatic capture zones are likely responsible for this effect. The instabilities are not observed at higher rotation speeds. The argon flow is found to be very complex within the cluster source; however, it seems crucial for its operation. The efficiency of transport of nanoparticles and their size increase with gas flow. The highest values of deposition rate of around 19 mg/h are obtained.