Impacts of O2 Plasma on Negative Gate Bias Stress Instability of Tunnel Thin-Film Transistor
IEEE Transactions on Plasma Science（2020）
关键词
Plasmas,Negative bias temperature instability,Thermal variables control,Stress,Logic gates,Thin film transistors,Degradation,Negative bias temperature instability (NBTI),plasma treatment,thin-film transistor (TFT),tunnel transistor
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