Analysis of imperfections sensitivity and vibration immunity of MEMS vibrating wheel gyroscope

This paper presents the results of modeling the nonlinear dynamics of MEMS vibrating wheel gyroscope. Diagrams of possible stationary oscillatory modes are constructed when primary oscillations are excited from an external generator. The influence of geometric design imperfections and perturbations of the physical and mechanical properties of the material on the dynamics and the output characteristic of the sensor is investigated. The factors of the presence of cross components of the elastic and dissipation forces, as well as the asymmetry of the electrode structure of the secondary axis, are considered. The influence of external vibrations on the operation of the gyroscope is studied for cases of translational and rotational vibrations of the base. A number of mechanisms for the transfer of vibration energy to angular vibrations of the sensitive element around the secondary axis are considered, and a quantitative assessment of the value of the false output signal is made depending on the nature of external vibrations, their frequency composition and imperfections in the gyroscope design.