Multi-Spectrum Analysis Of Growth Temperature Dependent Crystal Structure Of Mgzno Thin Films Grown On Sapphire

Deng Xie,Chong Chen,Zhi Ren Qiu,Hao Jiang,Dong Sing Wuu,Zhe Chuan Feng

2017 ASIA COMMUNICATIONS AND PHOTONICS CONFERENCE (ACP)（2017）

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摘要

Mg0.06Zn0.94O films are epitaxially grown at 350 to 650 degrees C. Depolarization effect was found occurs at similar to 390 nm, while the thickness non-uniformity increases with growth temperature, ascribed to increased Mg incorporation into hexagonal ZnO phase.

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关键词

multispectrum analysis,growth temperature dependent crystal structure,depolarization effect,thin films,temperature 350 degC to 650 degC,MgZnO

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