Low-Divergence High-Power Vcsel Arrays For Lidar Application

Development of multi-mode, high-power, large-aperture two-dimensional VCSEL arrays, operating at a nominal wavelength of 940nm, with highly stable beam profile will be presented. They are designed and fabricated using Trilumina's proprietary flip-chip-bondable back-side-emitting VCSEL array chip technology. We have demonstrated that a 150-element VCSEL chip array with the improved design shows divergence angle (FWHM) of less than 15 degrees. Additionally, we have integrated this design into drive circuitry that allows us to achieve peak optical powers in excess of 400W.